Ka 2020, ho ile ha hlahisoa lichifi tse fetang bilione lefatšeng ka bophara, tse lekanang le li-chips tse 130 tse nang le motho e mong le e mong lefatšeng.Leha ho le joalo, khaello ea morao-rao ea li-chip e ntse e tsoela pele ho bontša hore palo ena ha e so fihle moeling oa eona o ka holimo.
Leha li-chips li se li ka hlahisoa ka bongata bo boholo joalo, ho li hlahisa ha se mosebetsi o bonolo.Ts'ebetso ea ho etsa li-chips e rarahane, 'me kajeno re tla akaretsa mehato e ts'eletseng ea bohlokoa ka ho fetesisa: deposition, photoresist coating, lithography, etching, ion implantation, le ho paka.
Deposition
Mohato oa ho beha o qala ka sephaphatha, se khaotsoeng ho 99.99% silicon cylinder (eo hape e bitsoang "silicon ingot") ebe e belisoa ho fihlela qetellong e boreleli, ebe ho kenngoa filimi e tšesaane ea conductor, insulator kapa semiconductor. holim'a sephaphatha, ho itšetlehile ka litlhoko tsa sebopeho, e le hore lera la pele le ka hatisoa ho lona.Mohato ona oa bohlokoa hangata o bitsoa "deposition".
Ha li-chips li ntse li fokotseha, mekhoa ea khatiso ea li-wafer e fetoha e rarahaneng le ho feta.Tsoelo-pele ea ho beha, etching le lithography ke senotlolo sa ho etsa hore li-chips li be nyane le ho feta, ka hona, ho nts'etsapele ntšetso-pele ea Molao oa Moore.Sena se kenyelletsa mekhoa e mecha e sebelisang lisebelisoa tse ncha ho etsa hore mokhoa oa ho beha litaba o nepahale haholoanyane.
Ho roala ha Photoresist
Ka mor'a moo, li-wafers li tlotsoa ka "photoresist" (eo hape e bitsoang "photoresist").Ho na le mefuta e 'meli ea li-photoresists - "positive photoresists" le "negative photoresists".
Phapang e kholo pakeng tsa li-photoresists tse ntle le tse mpe ke sebopeho sa lik'hemik'hale tsa thepa le tsela eo photoresist e itšoarang ka eona ho khanya.Tabeng ea li-photoresists tse ntle, sebaka se pepesehileng khanya ea UV se fetola sebopeho 'me se qhibiliha haholoanyane, kahoo se se lokisetsa etching le deposition.Ka lehlakoreng le leng, li-photoresists tse mpe, li etsa polymerize libakeng tse pepesehetseng leseli, e leng se etsang hore ho be thata ho qhibiliha.Li-photoresists tse ntle ke tsona tse sebelisoang haholo tlhahisong ea li-semiconductor hobane li ka fihlela qeto e phahameng, e leng se etsang hore e be khetho e ntle bakeng sa sethala sa lithography.Hona joale ho na le lik'hamphani tse ngata lefatšeng ka bophara tse hlahisang li-photoresists bakeng sa tlhahiso ea semiconductor.
Photolithography
Photolithography e bohlokoa ts'ebetsong ea ho etsa li-chip hobane e etsa qeto ea hore na li-transistors tse ho chip li ka ba nyane hakae.Nakong ena, li-wafers li kenngoa mochine oa photolithography 'me li pepesehetse leseli le tebileng la ultraviolet.Hangata li nyenyane ho feta thollo ea lehlabathe ka makhetlo a likete.
Leseli le hlahisoa holim'a sephutheloana ka "mask plate" 'me lithography optics (lense ea DUV system) ea honyela ebe e shebana le mokhoa o hlophisitsoeng oa potoloho holim'a poleiti ea mask holim'a photoresist e holim'a bafa.Joalokaha ho hlalositsoe pejana, ha lebone le otla photoresist, ho ba le phetoho ea lik'hemik'hale e hatisang mohlala o holim'a mask plate holim'a seaparo sa photoresist.
Ho fumana mokhoa o hlakileng hantle ke mosebetsi o boima, o nang le tšitiso ea likaroloana, refraction le liphoso tse ling tsa 'mele kapa tsa lik'hemik'hale tse ka khonehang ts'ebetsong.Ke ka lebaka leo ka linako tse ling re hlokang ho ntlafatsa mokhoa oa ho qetela oa ho pepeseha ka ho lokisa ka ho khetheha paterone ea mask ho etsa hore paterone e hatisitsoeng e shebahale ka tsela eo re e batlang ka eona.Sistimi ea rona e sebelisa "computational lithography" ho kopanya mefuta ea algorithmic le data ho tsoa mochining oa lithography le liphaephe tsa liteko ho hlahisa moralo oa mask o fapaneng ka ho felletseng le mokhoa oa ho qetela oa ho pepeseha, empa ke seo re batlang ho se fihlela hobane ke eona feela tsela ea ho fumana. mokhoa o lakatsehang oa ho pepesa.
Etching
Mohato o latelang ke ho tlosa photoresist e senyehileng ho senola mokhoa o lakatsehang.Nakong ea ts'ebetso ea "etch", sephaphatha se behoa 'me se ntlafatsoa, 'me se seng sa photoresist sea hlatsuoa ho senola mocha o bulehileng oa 3D pattern.Ts'ebetso ea etching e tlameha ho theha likarolo tsa conductive ka nepo le ka mokhoa o ts'oanang ntle le ho senya botšepehi le botsitso ba sebopeho sa chip.Mekhoa e tsoetseng pele ea ho etsa li-chip e lumella baetsi ba li-chip ho sebelisa lipaterone tse habeli, tse quadruple le spacer ho theha litekanyo tse nyane tsa meralo ea sejoale-joale ea li-chip.
Joalo ka li-photoresists, etching e arotsoe ka mefuta e "omileng" le "metsi".Dry etching e sebelisa khase ho hlalosa mokhoa o pepeneneng holim'a sephaphatha.Etching ea metsi e sebelisa mekhoa ea lik'hemik'hale ho hloekisa sephaphatha.
Chip e na le likarolo tse ngata, kahoo etching e tlameha ho laoloa ka hloko ho qoba ho senya likarolo tse ka tlase tsa sebopeho sa li-multi-layer chip.Haeba sepheo sa etching ke ho theha sekoti mohahong, hoa hlokahala ho etsa bonnete ba hore botebo ba sekoti se nepahetse hantle.Meralo e meng ea li-chip e nang le likarolo tse fihlang ho 175, joalo ka 3D NAND, e etsa hore mohato oa bohlokoa o be bohlokoa haholo hape o be thata.
Ente ea Ion
Hang ha mohlala o kentsoe holim'a sephaphatha, sephaphatha se hlaseloa ka li-ion tse ntle kapa tse mpe ho lokisa thepa ea conductive ea karolo ea paterone.Joalo ka thepa ea li-wafers, silicon ea thepa e tala ha se insulator e phethahetseng kapa mokhanni ea phethahetseng.Lintho tsa conductive tsa Silicon li oela kae-kae lipakeng.
Ho tsamaisa li-ion tse chesitsoeng ka har'a kristale ea silicon e le hore phallo ea motlakase e laoloe ho theha li-switch tsa elektroniki tseo e leng li-block tsa motheo tsa chip, li-transistors, li bitsoa "ionization", e tsejoang hape e le "ion implantation".Ka mor'a hore lera le kenngoe ionized, photoresist e setseng e sebelisetsoang ho sireletsa sebaka se sa tsitsang se tlosoa.
Sephutheloana
Ho hlokahala mehato e likete ho theha chip holim'a sephaphatha, 'me ho nka nako e fetang likhoeli tse tharo ho tloha ho moralo ho ea ho tlhahiso.Ho tlosa chip ho tloha sephaphatha, e khaola ka li-chips ka bomong ho sebelisa sakha ea daemane.Li-chips tsena, tse bitsoang "bare die," li arotsoe ho tloha sephakeng sa lisenthimithara tse 12, e leng boholo bo atileng haholo bo sebelisoang tlhahisong ea semiconductor, mme hobane boholo ba li-chips bo fapana, li-wafers tse ling li ka ba le lichifi tse likete, ha tse ling li na le tse 'maloa feela. leshome le metso e mmedi.
Li-wafers tsena tse se nang letho li behoa holim'a "substrate" - substrate e sebelisang foil ea tšepe ho tsamaisa melaetsa ea ho kenya le ho tsoa ho tloha sephakeng se se nang letho ho ea tsamaisong eohle.E ntan'o koaheloa ka "sekoahelo sa mocheso", sejana se senyenyane, se sephara se sireletsang tšepe se nang le se pholileng ho etsa bonnete ba hore chip e lula e pholile nakong ea ts'ebetso.
Boemo ba Khoebo
Zhejiang NeoDen Technology Co., Ltd e 'nile ea etsa le ho romela mechine e fapaneng e fapaneng ea ho khetha le ho beha ho tloha ka 2010. Ho nka monyetla ka R&D ea rona e ruileng e nang le boiphihlelo, tlhahiso e koetlisitsoeng hantle, NeoDen e hapa botumo bo botle ho tsoa ho bareki ba lefats'e ka bophara.
ka boteng ba lefats'e ka bophara linaheng tse fetang 130, ts'ebetso e ntle haholo, ho nepahala ho phahameng le ho ts'epahala ha NeoDen.Mechini ea PNPli etse hore li phethahale bakeng sa R&D, prototyping ea litsebi le tlhahiso e nyane ho isa ho e mahareng.Re fana ka tharollo ea setsebi ea sesebelisoa se le seng sa SMT.
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Nako ea poso: Apr-24-2022